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Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
[Image: see text] Phase-controlled synthesis of two-dimensional (2D) transition-metal chalcogenides (TMCs) at low temperatures with a precise thickness control has to date been rarely reported. Here, we report on a process for the phase-controlled synthesis of TiS(2) (metallic) and TiS(3) (semicondu...
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| Wydane w: | Chem Mater |
|---|---|
| Główni autorzy: | , , , , , , , , |
| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
American Chemical
Society
2019
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| Dostęp online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6883357/ https://ncbi.nlm.nih.gov/pubmed/31806923 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.chemmater.9b02895 |
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