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Area-Selective Atomic Layer Deposition of Two-Dimensional WS(2) Nanolayers
[Image: see text] With downscaling of device dimensions, two-dimensional (2D) semiconducting transition metal dichalcogenides (TMDs) such as WS(2) are being considered as promising materials for future applications in nanoelectronics. However, at these nanoscale regimes, incorporating TMD layers in...
Αποθηκεύτηκε σε:
| Τόπος έκδοσης: | ACS Mater Lett |
|---|---|
| Κύριοι συγγραφείς: | , , , , , |
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
American Chemical
Society
2020
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| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7217612/ https://ncbi.nlm.nih.gov/pubmed/32421046 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsmaterialslett.0c00093 |
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