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Area-Selective Atomic Layer Deposition of Two-Dimensional WS(2) Nanolayers
[Image: see text] With downscaling of device dimensions, two-dimensional (2D) semiconducting transition metal dichalcogenides (TMDs) such as WS(2) are being considered as promising materials for future applications in nanoelectronics. However, at these nanoscale regimes, incorporating TMD layers in...
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| Publicado no: | ACS Mater Lett |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Chemical
Society
2020
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| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7217612/ https://ncbi.nlm.nih.gov/pubmed/32421046 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsmaterialslett.0c00093 |
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