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Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO(2) Bimorphs

Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose...

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Dettagli Bibliografici
Pubblicato in:Micromachines (Basel)
Autori principali: Wang, Peng, Liu, YaBing, Wang, Donglin, Liu, Huan, Liu, Weiguo, Xie, HuiKai
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI 2019
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC6843648/
https://ncbi.nlm.nih.gov/pubmed/31614853
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10100693
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