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Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO(2) Bimorphs

Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Argitaratua izan da:Micromachines (Basel)
Egile Nagusiak: Wang, Peng, Liu, YaBing, Wang, Donglin, Liu, Huan, Liu, Weiguo, Xie, HuiKai
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: MDPI 2019
Gaiak:
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC6843648/
https://ncbi.nlm.nih.gov/pubmed/31614853
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10100693
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