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Electrothermal Actuators for SiO(2) Photonic MEMS
This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 [Formula: see text]) silicon dioxide beams. This material platform enables the integration of actuators with photonic waveguides, producing mechanic...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190276/ https://ncbi.nlm.nih.gov/pubmed/30404373 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7110200 |
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