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Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror
In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph actuators symmetrically located at the four sides...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2015
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4721760/ https://ncbi.nlm.nih.gov/pubmed/26690432 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s151229840 |
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