APA Alıntı

Wang, P., Liu, Y., Wang, D., Liu, H., Liu, W., & Xie, H. (2019). Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO(2) Bimorphs. Micromachines (Basel).

Chicago Stili Alıntı

Wang, Peng, YaBing Liu, Donglin Wang, Huan Liu, Weiguo Liu, ve HuiKai Xie. "Stability Study of an Electrothermally-Actuated MEMS Mirror With Al/SiO(2) Bimorphs." Micromachines (Basel) 2019.

MLA Alıntı

Wang, Peng, et al. "Stability Study of an Electrothermally-Actuated MEMS Mirror With Al/SiO(2) Bimorphs." Micromachines (Basel) 2019.