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Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor
We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary...
Bewaard in:
| Gepubliceerd in: | Sensors (Basel) |
|---|---|
| Hoofdauteurs: | , , , , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
MDPI
2019
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6767347/ https://ncbi.nlm.nih.gov/pubmed/31540215 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19183954 |
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