Laddar...
A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure
A capacitive coupling structure is developed to improve the performances of a capacitive complementary metal oxide semiconductor (CMOS) microelectromechanical system (MEMS) humidity sensor. The humidity sensor was fabricated by a post-CMOS process. Silver nanowires were dispersed onto the top of a c...
Sparad:
| I publikationen: | Micromachines (Basel) |
|---|---|
| Huvudupphovsmän: | , , |
| Materialtyp: | Artigo |
| Språk: | Inglês |
| Publicerad: |
MDPI
2016
|
| Ämnen: | |
| Länkar: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190121/ https://ncbi.nlm.nih.gov/pubmed/30404251 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7050074 |
| Taggar: |
Lägg till en tagg
Inga taggar, Lägg till första taggen!
|