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Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions

This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched sacrificial spacer laye...

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Publicat a:Nanomaterials (Basel)
Autors principals: Banerjee, Aishwaryadev, Khan, Shakir-Ul Haque, Broadbent, Samuel, Likhite, Rugved, Looper, Ryan, Kim, Hanseup, Mastrangelo, Carlos H.
Format: Artigo
Idioma:Inglês
Publicat: MDPI 2019
Matèries:
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC6567118/
https://ncbi.nlm.nih.gov/pubmed/31083457
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano9050727
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