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Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions
This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched sacrificial spacer laye...
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| Izdano u: | Nanomaterials (Basel) |
|---|---|
| Glavni autori: | , , , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI
2019
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| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6567118/ https://ncbi.nlm.nih.gov/pubmed/31083457 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano9050727 |
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