Φορτώνει......
Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor
We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary...
Αποθηκεύτηκε σε:
| Τόπος έκδοσης: | Sensors (Basel) |
|---|---|
| Κύριοι συγγραφείς: | , , , , , |
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
MDPI
2019
|
| Θέματα: | |
| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6767347/ https://ncbi.nlm.nih.gov/pubmed/31540215 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19183954 |
| Ετικέτες: |
Προσθήκη ετικέτας
Δεν υπάρχουν, Καταχωρήστε ετικέτα πρώτοι!
|