A carregar...

ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition

For the analysis of thin films, with high aspect ratio (HAR) structures, time-of-flight secondary ion mass spectrometry (ToF-SIMS) overcomes several challenges in comparison to other frequently used techniques such as electron microscopy. The research presented herein focuses on two different kinds...

ver descrição completa

Na minha lista:
Detalhes bibliográficos
Publicado no:Nanomaterials (Basel)
Main Authors: Kia, Alireza M., Haufe, Nora, Esmaeili, Sajjad, Mart, Clemens, Utriainen, Mikko, Puurunen, Riikka L., Weinreich, Wenke
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6669757/
https://ncbi.nlm.nih.gov/pubmed/31331020
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano9071035
Tags: Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!