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Vapor deposition routes to conformal polymer thin films

Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic th...

Täydet tiedot

Tallennettuna:
Bibliografiset tiedot
Julkaisussa:Beilstein J Nanotechnol
Päätekijät: Moni, Priya, Al-Obeidi, Ahmed, Gleason, Karen K
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: Beilstein-Institut 2017
Aiheet:
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC5389201/
https://ncbi.nlm.nih.gov/pubmed/28487816
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.8.76
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