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Vapor deposition routes to conformal polymer thin films
Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic th...
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| Pubblicato in: | Beilstein J Nanotechnol |
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| Autori principali: | , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Beilstein-Institut
2017
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5389201/ https://ncbi.nlm.nih.gov/pubmed/28487816 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.8.76 |
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