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Fabrication of Tapered Micropillars with High Aspect-Ratio Based on Deep X-ray Lithography
In this study, a fabrication method of tapered microstructures with high aspect ratio was proposed by deep X-ray lithography. Tapered microstructures with several hundred micrometers and high aspect ratio are demanded owing to the high applicability in the fields of various microelectromechanical sy...
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| 發表在: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
MDPI
2019
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| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6651585/ https://ncbi.nlm.nih.gov/pubmed/31247998 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12132056 |
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