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Fabrication of Oblique Submicron-Scale Structures Using Synchrotron Hard X-ray Lithography

Oblique submicron-scale structures are used in various aspects of research, such as the directional characteristics of dry adhesives and wettability. Although deposition, etching, and lithography techniques are applied to fabricate oblique submicron-scale structures, these approaches have the proble...

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Detalhes bibliográficos
Publicado no:Polymers (Basel)
Main Authors: Kim, Kanghyun, Park, Kyungjin, Nam, Hyoryung, Kim, Geon Hwee, Hong, Seong Kyung, Kim, Suhyeon, Woo, Hyeonsu, Yoon, Seungbin, Kim, Jong Hyun, Lim, Geunbae
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
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Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC8037242/
https://ncbi.nlm.nih.gov/pubmed/33810563
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/polym13071045
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