Fabrication of Oblique Submicron-Scale Structures Using Synchrotron Hard X-ray Lithography

Oblique submicron-scale structures are used in various aspects of research, such as the directional characteristics of dry adhesives and wettability. Although deposition, etching, and lithography techniques are applied to fabricate oblique submicron-scale structures, these approaches have the proble...

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Bibliographic Details
Published in:Polymers (Basel)
Main Authors: Kim, Kanghyun, Park, Kyungjin, Nam, Hyoryung, Kim, Geon Hwee, Hong, Seong Kyung, Kim, Suhyeon, Woo, Hyeonsu, Yoon, Seungbin, Kim, Jong Hyun, Lim, Geunbae
Format: Artigo
Language:Inglês
Published: MDPI 2021
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Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC8037242/
https://ncbi.nlm.nih.gov/pubmed/33810563
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/polym13071045
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