Slow- and rapid-scan frequency-swept electrically detected magnetic resonance of MOSFETs with a non-resonant microwave probe within a semiconductor wafer-probing station

We report on a novel electron paramagnetic resonance (EPR) technique that merges electrically detected magnetic resonance (EDMR) with a conventional semiconductor wafer probing station. This union, which we refer to as wafer-level EDMR (WL- EDMR), allows EDMR measurements to be performed on an unalt...

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Detalhes bibliográficos
Publicado no:Rev Sci Instrum
Main Authors: McCrory, Duane J., Anders, Mark A., Ryan, Jason T., Shrestha, Pragya R., Cheung, Kin P., Lenahan, Patrick M., Campbell, Jason P.
Formato: Artigo
Idioma:Inglês
Publicado em: 2019
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6503682/
https://ncbi.nlm.nih.gov/pubmed/30709237
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.5053665
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