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Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam
Fabrication of single crystal diamond capacitive pressure sensor is presented. Firstly, the single crystal diamond cantilever beam was formed on HPHT diamond substrate by using selective high-energy ion implantation, metal patterning, ICP etching and electrochemical etching techniques. Secondly, on...
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| Udgivet i: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Nature Publishing Group UK
2019
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6423233/ https://ncbi.nlm.nih.gov/pubmed/30886167 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-019-40582-x |
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