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Analytic Optimization of Cantilevers for Photoacoustic Gas Sensor with Capacitive Transduction

We propose a new concept of photoacoustic gas sensing based on capacitive transduction which allows full integration while conserving the required characteristics of the sensor. For the sensor’s performance optimization, trial and error method is not feasible due to economic and time constrains. The...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Trzpil, Wioletta, Maurin, Nicolas, Rousseau, Roman, Ayache, Diba, Vicet, Aurore, Bahriz, Michael
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7926384/
https://ncbi.nlm.nih.gov/pubmed/33669992
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21041489
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