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Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption
Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS). We present the design and modeling...
Gardado en:
| Publicado en: | Micromachines (Basel) |
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| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2017
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6189825/ https://ncbi.nlm.nih.gov/pubmed/30400394 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8070203 |
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