Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon is surpassed by clamping loss. The stiffness-mass...

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Detaylı Bibliyografya
Yayımlandı:Micromachines (Basel)
Asıl Yazarlar: Zhou, Xin, Xiao, Dingbang, Li, Qingsong, Hu, Qian, Hou, Zhanqiang, He, Kaixuan, Chen, Zhihua, Zhao, Chun, Wu, Yulie, Wu, Xuezhong, Seshia, Ashwin
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: MDPI 2018
Konular:
Article
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC6187581/
https://ncbi.nlm.nih.gov/pubmed/30393316
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9010025
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