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A 4 mm(2) Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration
This paper reports the design and simulation of a 4 mm(2) double differential torsional MEMS accelerometer based on a double-beam configuration. Based on the structure of conventional torsional accelerometers, normally composed of one pair of proof masses and one torsional beam, this work explores t...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5677433/ https://ncbi.nlm.nih.gov/pubmed/28974039 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17102264 |
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