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0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)
The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes. This gyroscope consists of a sensor and readout electronics, and the characteristics of the sensor directly determine the performance. For the sensor, a high-quality factor and long decaying time constant a...
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| Publicat a: | Microsyst Nanoeng |
|---|---|
| Autors principals: | , , , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Nature Publishing Group UK
2018
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6240575/ https://ncbi.nlm.nih.gov/pubmed/31057920 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41378-018-0035-0 |
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