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Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator
Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon is surpassed by clamping loss. The stiffness-mass...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187581/ https://ncbi.nlm.nih.gov/pubmed/30393316 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9010025 |
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