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Enhanced near-infrared absorber: two-step fabricated structured black silicon and its device application

Silicon is widely used in semiconductor industry but has poor performance in near-infrared photoelectronic devices because of its high reflectance and band gap limit. In this study, two-step process, deep reactive ion etching (DRIE) method combined with plasma immersion ion implantation (PIII), are...

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Vydáno v:Nanoscale Res Lett
Hlavní autoři: Zhong, Hao, Ilyas, Nasir, Song, Yuhao, Li, Wei, Jiang, Yadong
Médium: Artigo
Jazyk:Inglês
Vydáno: Springer US 2018
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC6179974/
https://ncbi.nlm.nih.gov/pubmed/30306413
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-018-2741-9
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