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Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators
We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level. Measurements from four MEMS resonator geometries designed for ultrasensitive detection operating...
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| Publicat a: | Sensors (Basel) |
|---|---|
| Autors principals: | , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2018
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6164022/ https://ncbi.nlm.nih.gov/pubmed/30223610 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18093124 |
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