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Copper-to-copper direct bonding on highly (111)-oriented nanotwinned copper in no-vacuum ambient
A vacuum-free Cu-to-Cu direct bonding by using (111)-oriented and nanotwinned Cu has been achieved. A fast bonding process occurs in 5 min under a temperature gradient between 450 and 100 °C. It is verified by grain growth across the bonded interface. To investigate the grain growth behavior, furthe...
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| Publicado en: | Sci Rep |
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| Autores principales: | , , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Nature Publishing Group UK
2018
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6141480/ https://ncbi.nlm.nih.gov/pubmed/30224717 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-32280-x |
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