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Copper-to-copper direct bonding on highly (111)-oriented nanotwinned copper in no-vacuum ambient

A vacuum-free Cu-to-Cu direct bonding by using (111)-oriented and nanotwinned Cu has been achieved. A fast bonding process occurs in 5 min under a temperature gradient between 450 and 100 °C. It is verified by grain growth across the bonded interface. To investigate the grain growth behavior, furthe...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Juang, Jing-Ye, Lu, Chia-Ling, Chen, Kuan-Ju, Chen, Chao-Chang A., Hsu, Po-Ning, Chen, Chih, Tu, K. N.
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6141480/
https://ncbi.nlm.nih.gov/pubmed/30224717
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-32280-x
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