Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates

This paper details the application of phosphorus monolayer doping of silicon on insulator substrates. There have been no previous publications dedicated to the topic of MLD on SOI, which allows for the impact of reduced substrate dimensions to be probed. The doping was done through functionalization...

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Detalles Bibliográficos
Publicado en:Beilstein J Nanotechnol
Main Authors: Kennedy, Noel, Duffy, Ray, Eaton, Luke, O’Connell, Dan, Monaghan, Scott, Garvey, Shane, Connolly, James, Hatem, Chris, Holmes, Justin D, Long, Brenda
Formato: Artigo
Idioma:Inglês
Publicado: Beilstein-Institut 2018
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Full Research Paper
Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC6122086/
https://ncbi.nlm.nih.gov/pubmed/30202683
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.9.199
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