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Lithography for robust and editable atomic-scale silicon devices and memories
At the atomic scale, there has always been a trade-off between the ease of fabrication of structures and their thermal stability. Complex structures that are created effortlessly often disorder above cryogenic conditions. Conversely, systems with high thermal stability do not generally permit the sa...
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| Publicat a: | Nat Commun |
|---|---|
| Autors principals: | , , , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Nature Publishing Group UK
2018
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6056515/ https://ncbi.nlm.nih.gov/pubmed/30038236 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41467-018-05171-y |
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