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Lithography for robust and editable atomic-scale silicon devices and memories

At the atomic scale, there has always been a trade-off between the ease of fabrication of structures and their thermal stability. Complex structures that are created effortlessly often disorder above cryogenic conditions. Conversely, systems with high thermal stability do not generally permit the sa...

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Detalhes bibliográficos
Publicado no:Nat Commun
Main Authors: Achal, Roshan, Rashidi, Mohammad, Croshaw, Jeremiah, Churchill, David, Taucer, Marco, Huff, Taleana, Cloutier, Martin, Pitters, Jason, Wolkow, Robert A.
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6056515/
https://ncbi.nlm.nih.gov/pubmed/30038236
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41467-018-05171-y
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