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Know your full potential: Quantitative Kelvin probe force microscopy on nanoscale electrical devices

In this study we investigate the influence of the operation method in Kelvin probe force microscopy (KPFM) on the measured potential distribution. KPFM is widely used to map the nanoscale potential distribution in operating devices, e.g., in thin film transistors or on cross sections of functional s...

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Detalhes bibliográficos
Publicado no:Beilstein J Nanotechnol
Main Authors: Axt, Amelie, Hermes, Ilka M, Bergmann, Victor W, Tausendpfund, Niklas, Weber, Stefan A L
Formato: Artigo
Idioma:Inglês
Publicado em: Beilstein-Institut 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6009372/
https://ncbi.nlm.nih.gov/pubmed/29977714
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.9.172
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