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Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application
MEMS fabrication that is based on the silicon-on-glass (SOG) process requires many steps, including patterning, anodic bonding, deep reactive ion etching (DRIE), and chemical mechanical polishing (CMP). The effects of the process parameters of CMP and DRIE are investigated in this study. The process...
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| Veröffentlicht in: | Sensors (Basel) |
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| Hauptverfasser: | , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5948758/ https://ncbi.nlm.nih.gov/pubmed/29673221 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18041240 |
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