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Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope
This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with eight double U-beam structures was developed, and 24...
Spremljeno u:
| Izdano u: | Micromachines (Basel) |
|---|---|
| Glavni autori: | , , , , , , , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI
2019
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| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6471518/ https://ncbi.nlm.nih.gov/pubmed/30871223 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10030186 |
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