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MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control
In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that th...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6523767/ https://ncbi.nlm.nih.gov/pubmed/31013981 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10040248 |
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