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The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

With the miniaturization of micro-electro-mechanical system (MEMS) gyroscopes, it is necessary to study their nonlinearity. The phase-frequency characteristics, which affect the start-up time, are crucial for guaranteeing the gyroscopes’ applicability. Nevertheless, although the amplitude-frequency...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Su, Yan, Xu, Pengfei, Han, Guowei, Si, Chaowei, Ning, Jin, Yang, Fuhua
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7074754/
https://ncbi.nlm.nih.gov/pubmed/32102407
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11020233
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