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Gas-assisted silver deposition with a focused electron beam
Focused electron beam induced deposition (FEBID) is a flexible direct-write method to obtain defined structures with a high lateral resolution. In order to use this technique in application fields such as plasmonics, suitable precursors which allow the deposition of desired materials have to be iden...
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| Pubblicato in: | Beilstein J Nanotechnol |
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| Autori principali: | , , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Beilstein-Institut
2018
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5789381/ https://ncbi.nlm.nih.gov/pubmed/29441267 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.9.24 |
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