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Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate
High-resolution metallic nanostructures can be fabricated with multistep processes, such as electron beam lithography or ice lithography. The gas-assisted direct-write technique known as focused electron beam induced deposition (FEBID) is more versatile than the other candidates. However, it suffers...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8161174/ https://ncbi.nlm.nih.gov/pubmed/34065297 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12050580 |
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