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Gas-assisted silver deposition with a focused electron beam

Focused electron beam induced deposition (FEBID) is a flexible direct-write method to obtain defined structures with a high lateral resolution. In order to use this technique in application fields such as plasmonics, suitable precursors which allow the deposition of desired materials have to be iden...

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Detalhes bibliográficos
Publicado no:Beilstein J Nanotechnol
Main Authors: Berger, Luisa, Madajska, Katarzyna, Szymanska, Iwona B, Höflich, Katja, Polyakov, Mikhail N, Jurczyk, Jakub, Guerra-Nuñez, Carlos, Utke, Ivo
Formato: Artigo
Idioma:Inglês
Publicado em: Beilstein-Institut 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5789381/
https://ncbi.nlm.nih.gov/pubmed/29441267
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.9.24
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