Fabrication of multiple nanopores in a SiN(x) membrane via controlled breakdown

This paper reports a controlled breakdown (CBD) method to fabricate multiple nanopores in a silicon nitride (SiN(x)) membrane with control over both nanopore count and nanopore diameter. Despite the stochastic process of the breakdown, we found that the nanopores created via CBD, tend to be of the s...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Cyhoeddwyd yn:Sci Rep
Prif Awduron: Wang, Yunlong, Ying, Cuifeng, Zhou, Wenyuan, de Vreede, Lennart, Liu, Zhibo, Tian, Jianguo
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: Nature Publishing Group UK 2018
Pynciau:
Article
Mynediad Ar-lein:https://ncbi.nlm.nih.gov/pmc/articles/PMC5775244/
https://ncbi.nlm.nih.gov/pubmed/29352158
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-19450-7
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