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Fabrication of multiple nanopores in a SiN(x) membrane via controlled breakdown

This paper reports a controlled breakdown (CBD) method to fabricate multiple nanopores in a silicon nitride (SiN(x)) membrane with control over both nanopore count and nanopore diameter. Despite the stochastic process of the breakdown, we found that the nanopores created via CBD, tend to be of the s...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Argitaratua izan da:Sci Rep
Egile Nagusiak: Wang, Yunlong, Ying, Cuifeng, Zhou, Wenyuan, de Vreede, Lennart, Liu, Zhibo, Tian, Jianguo
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: Nature Publishing Group UK 2018
Gaiak:
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC5775244/
https://ncbi.nlm.nih.gov/pubmed/29352158
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-19450-7
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