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Fabrication of multiple nanopores in a SiN(x) membrane via controlled breakdown
This paper reports a controlled breakdown (CBD) method to fabricate multiple nanopores in a silicon nitride (SiN(x)) membrane with control over both nanopore count and nanopore diameter. Despite the stochastic process of the breakdown, we found that the nanopores created via CBD, tend to be of the s...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5775244/ https://ncbi.nlm.nih.gov/pubmed/29352158 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-19450-7 |
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