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Two-step breakdown of a SiN membrane for nanopore fabrication: Formation of thin portion and penetration

For the nanopore sensing of various large molecules, such as probe-labelled DNA and antigen-antibody complexes, the nanopore size has to be customized for each target molecule. The recently developed nanopore fabrication method utilizing dielectric breakdown of a membrane is simple and quite inexpen...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Yanagi, Itaru, Hamamura, Hirotaka, Akahori, Rena, Takeda, Ken-ichi
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6031669/
https://ncbi.nlm.nih.gov/pubmed/29973672
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-28524-5
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