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Monolithic Fabrication of NPN/SiN(x) Dual Membrane Cavity for Nanopore-based DNA Sensing
Nanoscale preconfinement of DNA has been shown to reduce the variation of passage times through solid-state nanopores. Preconfinement has been previously achieved by forming a femtoliter-sized cavity capped with a highly porous layer of nanoporous silicon nitride (NPN). This cavity was formed by sea...
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| Vydáno v: | Adv Mater Interfaces |
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| Hlavní autoři: | , , , , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
2019
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7310959/ https://ncbi.nlm.nih.gov/pubmed/32577337 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/admi.201900684 |
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