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Monolithic Fabrication of NPN/SiN(x) Dual Membrane Cavity for Nanopore-based DNA Sensing

Nanoscale preconfinement of DNA has been shown to reduce the variation of passage times through solid-state nanopores. Preconfinement has been previously achieved by forming a femtoliter-sized cavity capped with a highly porous layer of nanoporous silicon nitride (NPN). This cavity was formed by sea...

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Detalhes bibliográficos
Publicado no:Adv Mater Interfaces
Main Authors: Madejski, Gregory R., Briggs, Kyle, DesOrmeaux, Jon-Paul, Miller, Joshua J., Roussie, James A., Tabard-Cossa, Vincent, McGrath, James L.
Formato: Artigo
Idioma:Inglês
Publicado em: 2019
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Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7310959/
https://ncbi.nlm.nih.gov/pubmed/32577337
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/admi.201900684
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