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Excellent Rectifying Properties of the n-3C-SiC/p-Si Heterojunction Subjected to High Temperature Annealing for Electronics, MEMS, and LED Applications

This work examines the stability of epitaxial 3C-SiC/Si heterojunctions subjected to heat treatments between 1000 °C and 1300 °C. Because of the potential for silicon carbide in high temperature and harsh environment applications, and the economic advantages of growing the 3C-SiC polytype on large d...

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Bibliografski detalji
Izdano u:Sci Rep
Glavni autori: Tanner, Philip, Iacopi, Alan, Phan, Hoang-Phuong, Dimitrijev, Sima, Hold, Leonie, Chaik, Kien, Walker, Glenn, Dao, Dzung Viet, Nguyen, Nam-Trung
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group UK 2017
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Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC5735178/
https://ncbi.nlm.nih.gov/pubmed/29255167
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-17985-9
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