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Piezoresistive effect in p-type 3C-SiC at high temperatures characterized using Joule heating

Cubic silicon carbide is a promising material for Micro Electro Mechanical Systems (MEMS) applications in harsh environ-ments and bioapplications thanks to its large band gap, chemical inertness, excellent corrosion tolerance and capability of growth on a Si substrate. This paper reports the piezore...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Dimitrijev, Sima, Nguyen, Nam-Trung, Dao, Dzung Viet
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4923857/
https://ncbi.nlm.nih.gov/pubmed/27349378
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep28499
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