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Reflective Small Angle Electron Scattering to Characterize Nanostructures on Opaque Substrates
Features sizes in integrated circuits (ICs) are often at the scale of 10 nm and are ever shrinking. ICs appearing in today’s computers and hand held devices are perhaps the most prominent examples. These smaller feature sizes demand equivalent advances in fast and accurate dimensional metrology for...
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| Publié dans: | Appl Phys Lett |
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| Auteurs principaux: | , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
2017
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5726286/ https://ncbi.nlm.nih.gov/pubmed/29242646 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4991696 |
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