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Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension Targets
Dimensional scaling trends will eventually bring semiconductor critical dimensions (CDs) down to only a few atoms in width. New optical techniques are required to address the measurement and variability for these CDs using sufficiently small in-die metrology targets. Recently, Qin et al. [Light Sci...
Gardado en:
| Publicado en: | Proc SPIE Int Soc Opt Eng |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
2016
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5528868/ https://ncbi.nlm.nih.gov/pubmed/28757674 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2221920 |
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