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Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension Targets
Dimensional scaling trends will eventually bring semiconductor critical dimensions (CDs) down to only a few atoms in width. New optical techniques are required to address the measurement and variability for these CDs using sufficiently small in-die metrology targets. Recently, Qin et al. [Light Sci...
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| Publicat a: | Proc SPIE Int Soc Opt Eng |
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| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2016
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5528868/ https://ncbi.nlm.nih.gov/pubmed/28757674 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2221920 |
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