A carregar...
Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension Targets
Dimensional scaling trends will eventually bring semiconductor critical dimensions (CDs) down to only a few atoms in width. New optical techniques are required to address the measurement and variability for these CDs using sufficiently small in-die metrology targets. Recently, Qin et al. [Light Sci...
Na minha lista:
| Publicado no: | Proc SPIE Int Soc Opt Eng |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2016
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5528868/ https://ncbi.nlm.nih.gov/pubmed/28757674 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2221920 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|