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Microfluidic devices fabricated using fast wafer-scale LED-lithography patterning

Current lithography approaches underpinning the fabrication of microfluidic devices rely on UV exposure of photoresists to define microstructures in these materials. Conventionally, this objective is achieved with gas discharge mercury lamps, which are capable of producing high intensity UV radiatio...

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Detalhes bibliográficos
Publicado no:Biomicrofluidics
Main Authors: Challa, Pavan K., Kartanas, Tadas, Charmet, Jérôme, Knowles, Tuomas P. J.
Formato: Artigo
Idioma:Inglês
Publicado em: AIP Publishing LLC 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5315664/
https://ncbi.nlm.nih.gov/pubmed/28289484
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4976690
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